imec, the research and innovation hub in nanoelectronics and digital technologies, and ASML, a leading developer of lithographic equipment, have announced the next step in their ongoing and extensive ...
Moreover they will explore the potential of the next-generation high-NA EUV lithography to enable scaling towards the post 3nm node. To this end, they will establish a joint high-NA EUV research lab. ...
SAN FRANCISCO, United States, 10 July 2017 - ASML Holding NV (ASML) today announced lithography, metrology and software innovations at SEMICON West. ASML`s Holistic Lithography integrates a set of ...
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